LMSP-X1 HIWIN

LMSP-X1 HIWIN

 

Item				Specifications
				LMSP-X1	LMSP-X2
	Motor			Forcer: hybrid planar motor Stator: integral grid platen
	Support			Air bearing
	Position sensing			Direct feedback through position sensors in 3 axes (X1/X2/Y)
	Control	Position		Direct feedback servo control of X, Y and yaw error
		Commutation control		Amplitude/phase control using 2-phase sine wave linear amplifier
	Max. force			75 N	140 N
	Max. speed			0.9m/s	0.8m/s
	Forcer weight			1.8 kg	3.7 kg
	Max. Load			14 kg	28 kg
	Air flow rate			6.4 liter/min	21 liter/min
	Air supply pressure for bearing			3.0±0.3bar
	XY stage accuracy			±15 µ m
	Position sensor resolution		X,Y	1 µ m
			Yaw	0.8 arc-second
	Positioning resolution		X.Y	1 µ m
	Repeatability		X.Y	3 µ m

 

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